Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization

In this paper, we present a bi-directional extended range parallel-plate electrostatic actuator using feedback linearization control. The actuator can have stable displacements up to 90% of the full-gap (limited by mechanical stoppers) on both directions, i.e., the device can move ±2μm within a ±2.25μm gap. The system has successfully tracked references until 1kHz (limited by the dynamics of the device) and it presents a capacitor tuning range of 17, using an actuation voltage from 0 to 10V. The results presented here are a clear advance in respect to the current state-of-the-art in terms of tracking capabilities, total stable displacement and tuning range.