Title :
Fabrication of sol-gel derived glass based waveguide on indium phosphide for hybridized integrated optics application
Author :
Liu, Jiangchuan ; Lam, Y.L. ; Chan, Y.C. ; Zhou, Yangzhong ; Que, W.X. ; Ooi, Boon S.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Inst., Singapore
Abstract :
Summary form only given. Considering the low cost and a large variety of applications for sol-gel derived optical glass waveguides, as well as the requirement of indium phosphide (InP) based materials for manufacturing active devices used in data communication, we expect that tremendous potential applications be possible if we can integrate them together. Challenges exist for doing so due to the totally different systems of glass and III-V compounds. The poor heat-bearing ability of InP, the lattice mismatch and the large difference in the thermal expansion coefficient between glass and indium phosphide based materials greatly impede their hybridization. We report the first successful fabrication of a planar glass based waveguide on indium phosphide substrate by means of the sol-gel route.
Keywords :
III-V semiconductors; indium compounds; optical fabrication; optical glass; optical planar waveguides; sol-gel processing; substrates; thermal expansion; III-V compounds; InP; active devices; data communication; fabrication; heat-bearing ability; hybridized integrated optics application; lattice mismatch; optical glass waveguides; planar glass based waveguide; sol-gel derived glass based waveguide; sol-gel route; thermal expansion coefficient; Costs; Data communication; Glass manufacturing; III-V semiconductor materials; Indium phosphide; Integrated optics; Optical device fabrication; Optical devices; Optical materials; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-595-1
DOI :
10.1109/CLEO.1999.834499