Title :
FEA image sensor with electron-beam focusing system
Author :
Egami, N. ; Nanba, M. ; Takiguchi, Y. ; Osada, K. ; Watabe, T. ; Okazaki, S. ; Obara, Y. ; Tanaka, M. ; Itoh, S.
Author_Institution :
NHK Sci. & Tech. Res. Labs., Tokyo, Japan
Abstract :
A 256×192 pixel FEA image sensor with an electron-beam focusing system was fabricated and tested. The experimental results revealed that the sensor could obtain sufficient resolution for its pixel size of 50×50 μm by focusing the electron beam emitted from the FEA onto a photoconductive target, demonstrating its potential as a practical image sensor with small pixels.
Keywords :
electron beam focusing; field emitter arrays; image resolution; image sensors; FEA image sensor; electron-beam focusing system; field emitter array; photoconductive target; pixel size; resolution; Electrodes; Electron beams; Focusing; Image sensors; Magnetic flux; Magnetic sensors; Photoconductivity; Pixel; Prototypes; Sensor systems;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2004.1354987
