Title :
High current, high current density field emitter array cathodes
Author :
Schwoebel, P.R. ; Spindt, C.A. ; Holland, C.E.
Author_Institution :
Microsystems Eng. Center, SRI Int., Menlo Park, CA, USA
Abstract :
Summary form only given. Field emitter array cathodes have historically not achieved their full potential due to imperfect spatial uniformity of emission. To address this issue, an in situ cathode processing technique was used to demonstrate an emission current of 300 mA from a 50,000-tip array covering an area of 7.8×10/sup -3/ cm/sup 2/. This corresponds to a current density of 38 A/cm/sup 2/. To the authors´ knowledge, such a total emission current from single FEA´s has never been reported.
Keywords :
cathodes; current density; field emitter arrays; emission current; high current density field emitter array cathodes; in situ cathode processing technique; Cathodes; Current density; Field emitter arrays;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Conference_Location :
Cambridge, MA, USA
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2004.1354989
