Title :
Usefulness of nanocrystalline silicon ballistic emitter for operation in either low-vacuum or atmospheric pressure
Author :
Koshida, Nobuyoshi ; Kojima, Akin ; Ichihara, Takuya ; Komoda, Vakuya
Author_Institution :
Graduate Sch. of Technol., Tokyo Univ., Japan
Abstract :
The nc-Si emitter operates as a ballistic cold cathode in low vacuum and as a negative ion source in atmospheric pressure. This usefulness is consistent with the ballistic emission model that energetic electrons are generated in nc-Si chains interconnected via thin oxides. The present result indicates further potential of this emitter for various applications in a wide range of pressure and gas ambient.
Keywords :
cathodes; electron field emission; elemental semiconductors; nanostructured materials; semiconductor devices; silicon; Si; atmospheric pressure operation; ballistic cold cathode; ballistic emission model; energetic electrons; low-vacuum operation; nanocrystalline Si chains; nanocrystalline silicon ballistic emitter; negative ion source; thin oxides; Atmospheric measurements; Cathodes; Diodes; Electron emission; Electron guns; Elementary particle vacuum; Postal services; Silicon; Tunneling; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2004.1354992
