Title :
Vertically-curved silicon waveguide fabricated by ion-induced bending method for vertical light coupling
Author :
Yoshida, Takafumi ; Nishi, Tomoki ; Tajima, Shinya ; Takei, Ryohei ; Suzuki, M. ; Omoda, E. ; Nagao, Masaru ; Miura, Naruhisa ; Mori, Marco ; Sakakibara, Y.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
Silicon waveguide curving in the vertical direction from the substrate was fabricated using ion-induced bending method. Vertical light emission from the waveguide was observed.
Keywords :
elemental semiconductors; integrated optics; light propagation; optical couplers; optical fabrication; optical waveguides; silicon; Si; ion-induced bending method; vertical light coupling; vertical light emission; vertically-curved silicon waveguide fabrication; waveguide curving; Couplers; Couplings; Fabrication; Optical waveguides; Radiation effects; Silicon; Wires; ion induced bending (IIB); photonic integrated circuits (PICs); vertically curved silicon waveguide;
Conference_Titel :
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4673-5803-3
DOI :
10.1109/Group4.2013.6644440
