Title :
Displacement magnification of gel actuator using pNIPAAm-SU8 hybrid structure
Author :
Kogure, Takanobu ; Okada, Ryoya ; Maeda, Shingo ; Nagasawa, Sumito
Author_Institution :
Dept. of Eng. Sci. & Mech., Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
In this paper, a fabrication method for a hybrid structure of the poly-N-Isopropylacrylamide (pNIPAAm) gel as a soft material and the SU-8 as a solid material is proposed. This pNIPAAm-SU8 hybrid structure can be applied to various applications such as gel actuators. These hybrid structures have a serious problem that it is easily broken by the difference of swelling rate. Our proposed hybrid structure was not broken though repeating swelling-shrinking states for 10 or more times. A small displacement of the gel is occurred by the phase transition, then it is magnified by combining with the SU-8 solid structure. We demonstrated that the expanded tip displacement of the SU-8 solid structure reached 145μm.
Keywords :
actuators; gels; hydrogels; swelling; SU-8 solid structure; displacement magnification; expanded tip displacement; fabrication method; gel actuator; gel displacement; pNIPAAm gel; pNIPAAm-SU8 hybrid structure; poly-N-Isopropylacrylamide gel; soft material; solid material; swelling rate; Actuators; Copper; Fabrication; Heating; Polymers; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051151