Title :
Liquid-tolerant electret using super-lyophobic pillar surface
Author :
Yu-Chung Chen ; Ki-Young Song ; Morimoto, Kenichi ; Suzuki, Yuji
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
For the first time, we have realized electret that can be used in the liquid environment toward better performance of electret-based generators and actuators. By using super-lyophobic overhanging pillar surface, stable Cassie-Baxter (C-B) state is sustained even with low-surface-tension hexadecane liquid and with high surface potential. Pillar surface with a SiO2 electret layer has been successfully charged with soft X-ray photoionization we previously developed. The pillar surface significantly suppressed the charge decay, and surface potential as high as 160 V has been maintained after 5-day contact with hexadecane droplet.
Keywords :
drops; electrets; photoionisation; silicon compounds; surface potential; surface tension; SiO2; charge decay; electret layer; electret-based generators; hexadecane droplet; liquid environment; liquid-tolerant electret; low-surface-tension hexadecane liquid; soft X-ray photoionization; stable Cassie-Baxter state; super-lyophobic pillar surface; surface potential; Electrets; Electric potential; Liquids; Silicon; Surface charging; Surface treatment; Voltage measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051152