Microfabrication of Helmholtz Coils with Integrated Channels for NMR Spectroscopy

A new technology for the microfabrication of Helmholtz microcoils with integrated SU-8 channels for NMR spectroscopy is presented. These Helmholtz microcoils demonstrate superior NMR performance regarding spin excitation uniformity compared to planar microcoils. The improved spin excitation uniformity opens the way to advanced chemical analysis using complex RF-pulse sequences. The fabricated Helmholtz coils have Q-factor greater than 20 due to electroplated coil turns and vias, which connect the upper and lower turns. The laminated SU-8 microchannel technology allows the implementation of further fluidic functions. Analyzing living cells, mechanical filters can be integrated for sample concentration and enhanced detection.