Title :
Atmospheric Pressure Airmicroplasma Ionization Source for Chemical Analysis Applications
Author :
Wright, J.A. ; Miller, R.A. ; Nazarov, E.G.
Author_Institution :
Sionex Corporation, Bedford, Massachusetts, USA
Abstract :
An atmospheric pressure microplasma ionization source operating in ambient air and nitrogen is presented. Utilizing planar dielectric barrier discharge configuration, low power operation (< 250 mW) and long continuous operating lifetime (> 5000 hours) is demonstrated. Fitting of nitrogen rotational spectroscopy measurements indicate the microplasma operates at ambient temperature. Ion intensity and signal-to-noise data generated by the microplasma are compared to those produced from a 5 mCi,63Ni foil, a radioactive source widely used in chemical detection equipment. End of life failure mode is discussed.
Keywords :
Atmospheric measurements; Chemical analysis; Dielectric measurements; Fault location; Ionization; Nitrogen; Rotation measurement; Signal generators; Spectroscopy; Temperature;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627815