DocumentCode
1876720
Title
Integration of photonic circuits with electronics on bulk-Si platform
Author
Lee, B.S. ; Cho, K.S. ; Shin, Y.H. ; Kim, Ji H. ; Bok, J.K. ; Kim, S.G. ; Shin, D.J. ; Lee, S.Y. ; Choi, S.H. ; Ji, H.C. ; Cho, K.Y. ; Byun, H.I. ; Joe, I.S. ; Kuh, B.J. ; Nejadmalayeri, A. ; Sunil, P. ; Shin, J.H. ; Lim, J.S. ; Kim, B.S. ; Choi, H.M. ; H
Author_Institution
Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
fYear
2013
fDate
28-30 Aug. 2013
Firstpage
1
Lastpage
2
Abstract
The integration of photonic devices with electronic circuit using CMOS-compatible process is presented in this paper. Issues and challenges in the design of process integration are discussed.
Keywords
CMOS integrated circuits; elemental semiconductors; integrated circuit design; integrated optoelectronics; silicon; CMOS-compatible process; Si; bulk-Si platform; electronic circuit; photonic circuits; photonic devices; process integration; Integrated optics; Optical fibers; Optical imaging; Optical interferometry; Photonics;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location
Seoul
ISSN
1949-2081
Print_ISBN
978-1-4673-5803-3
Type
conf
DOI
10.1109/Group4.2013.6644460
Filename
6644460
Link To Document