Method and structure for local emission regulation and arc prevention in field emitter arrays

We propose an alternative arc-prevention and emission regulation method that allows high current densities and enforces a narrow energy distribution. The method requires a structure incorporating a filter aperture over the usual gate aperture. The top aperture acts as a high-pass energy filter. When the filter is negative with respect to the gate, a potential energy barrier is created in the path of the emitted electrons. Also, the energy distribution often becomes narrower and shifts closer to E_F after operating the emitters in UHV. The energy shift shows that the potential drop in the emitter is reduced, suggesting that the dielectric surface layer has become more conductive and/or thinner.