Title :
Configurable silicon photonics with electron beam bleaching
Author :
Petrov, A.Yu. ; Prorok, Stefan ; Eich, M. ; Jingdong Luo ; Jen, Alex K.
Author_Institution :
Inst. for Opt. & Electron. Mater., Hamburg Univ. of Technol., Hamburg, Germany
Abstract :
A concept is proposed and realized for post-fabrication trimming as well as new structures fabrication on functionalized silicon platform. Electron beam bleaching of a chromophore doped polymer cladding is applied.
Keywords :
bleaching (materials processing); cladding techniques; elemental semiconductors; integrated optics; optical fabrication; optical polymers; silicon; Si; chromophore doped polymer cladding; configurable silicon photonics; electron beam bleaching; functionalized silicon platform; post-fabrication trimming; structures fabrication; Bleaching; Cavity resonators; Electron beams; Photonic crystals; Polymers; Refractive index; Silicon;
Conference_Titel :
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4673-5803-3
DOI :
10.1109/Group4.2013.6644466
