Implantable Ultrasound Emitter Array for Medical Applications

An implantable ultrasonic transducer array for medical diagnosis and stimulation has been developed. This device uses thin-film drum structures to emit and sense ultrasounds. The silicon substrate of the array is micromachined into a probe shape of a cross-sectional dimension as small as 40 µ m (thickness) × 80 µ m (width) such that the array can be implanted into tissue with a minimal disruption. This device is useful for accessing area that is difficult to reach using traditional ultrasound devices. Its applications include measuring tissue temperature and blood flow rate of fine vessels in tissue as well as cell stimulation. This miniature ultrasound array operates at a peak-to-peak voltage of 25V and is able to deliver 1.7MHz ultrasound waves at an output pressure of about 0.34 ATM.