Title :
Vertical grating coupler-based silicon photonic devices and photonic integrated circuits on CMOS-compatible SOI platform
Author :
Hongda Chen ; Beiju Huang ; Zanyun Zhang ; Zan Zhang
Author_Institution :
State Key Lab. on Integrated Optoelectron., Inst. of Semicond., Beijing, China
Abstract :
A novel vertical grating coupler-based silicon photonic devices and photonic integrated circuits (PIC) have been demonstrated on CMOS-compatible SOI Platform. The monolithically PIC demonstrated 4Gb/s optical interconnection.
Keywords :
CMOS integrated circuits; diffraction gratings; elemental semiconductors; integrated optics; integrated optoelectronics; optical couplers; optical interconnections; optical waveguides; silicon; silicon-on-insulator; CMOS-compatible SOI platform; Si-Si; bit rate 4 Gbit/s; monolithic PIC; optical interconnection; photonic integrated circuits; silicon photonic devices; silicon-on-insulator; vertical grating coupler; Couplers; Gratings; Modulation; Optical fiber couplers; Photonics; Silicon; Grating coupler; Optical interconnections; Photonic integrated circuit (PIC); Silicon photonics;
Conference_Titel :
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4673-5803-3
DOI :
10.1109/Group4.2013.6644479