Two-Dimensional Silicon Smart Tactile Image-Sensor with Single Sensing Diaphragm Actuated by Vibrating Pressure for Simultaneous Detection of Force and Object Hardness Distributions

In this paper, a novel tactile image-sensor with detection ability of two-dimensional distributions of object hardness and contact-force is presented. Actuating the sensing diaphragm by small pressure vibration, plural information of the object on the tactile image-sensor can be detected with the same sensing elements on it. Hardness distribution of touching object is detected simultaneously with distribution of static contact-force, since their signals are processed separately in frequency domain. In addition, since vibrating sensor surface is highly sensitive to slight contact-force, initial point of object touching with below 500 µ N force was successfully detected at the same time.