Title :
A Three Dimensional Microflown
Author :
Yntema, D.R. ; van Honschoten, J.W. ; de Bree, H.-E. ; Wiegerink, R.J. ; Elwenspoek, M.
Author_Institution :
Transducers Science and Technology group, MESA+ Institute for Nanotechnology, University of Twente, the Netherlands
Abstract :
An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.
Keywords :
Acoustic measurements; Acoustic sensors; Etching; Fabrication; Noise measurement; Particle measurements; Resists; Silicon; Velocity measurement; Wires;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627884
