Title :
A Novel High Performance Micromechanical Resonant Electrostatic Field Sensor Used In Atmospheric Electric Field Detection
Author :
Peng, Chunrong ; Chen, Xianxiang ; Bai, Qiang ; Luo, Lei ; Xia, Shanhong
Author_Institution :
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China; Graduate School of the Chinese Academy of Sciences Beijing 100039, China
Abstract :
This paper reports a high performance micromechanical resonant electrostatic field sensor (EFS) that is fabricated with a three-layer polysilicon surface micromachining process. The EFS has a high resolution of 100V/m when used in ambient air at room temperature. The driving voltage is 25V DC and 0.3Vp-p AC lower than other reported electrostatic comb driven devices. Experimental results show that the EFS can be succeeded in atmospheric electric field detecting.
Keywords :
Atmospheric measurements; Blades; Electric fields; Electrodes; Electrostatic measurements; Micromachining; Micromechanical devices; Milling machines; Resonance; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627895
