DocumentCode
1879081
Title
Practical High-Speed Metal-Based Optical Microscanning Devices with Low Production Cost
Author
Park, Jae-Hyuk ; Akedo, Jun ; Sato, Harumichi ; Lebedev, Maxim
Author_Institution
National Institute of Advanced Industrial Science and Technology (AIST), JAPAN
fYear
2006
fDate
2006
Firstpage
730
Lastpage
733
Abstract
Practical high-speed metal-based optical microscanning devices with low production cost and simple fabrication process were successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35 ° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package.
Keywords
Aerosols; Costs; High speed optical techniques; Optical device fabrication; Optical devices; Packaging; Piezoelectric materials; Production; Resonance; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627903
Filename
1627903
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