Title :
Vertical Drive Micro Actuator Using SMA Thin Film For A Smart Button
Author :
Yoshikawa, W. ; Sasabe, A. ; Sugano, K. ; Tsuchiya, T. ; Tabata, O. ; Ishida, A.
Author_Institution :
Kyoto University, Japan
Abstract :
This paper presents the performance of a shape memory alloy (SMA) thin film micro-actuator for a small tactile display to reproduce an object texture to a fingertip. Maximum displacement of 30 μm under 4.2 mN load with an actuator length of 1 mm, which fulfills the minimum requirements for reproducing a texture to a fingertip, is realized by the newly proposed SMA thin film actuator structure.
Keywords :
Computer displays; Etching; Fabrication; Intelligent actuators; Microactuators; Performance analysis; Polymers; Sputtering; Substrates; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627904
