EWOD (Electrowetting-on-Dielectric) Actuated Optical Micromirror

This paper introduces a novel method to control the tilting motion of an optical micromirror using EWOD (Electrowetting-on-Dielectric) actuation that can be used in optical devices (e.g., optical scanner, large scale display). Using the vertical motion of a liquid droplet during EWOD movement that gives a height difference due to the contact angle variation at the three-phase contact line by an applied voltage, a dramatically simplified and effective tilting motion of micromirror can be realized. The actuation concept, fabrication, and test of the initial devices are reported. A preliminary time response experiment of our initial device is also included to examine the feasibility of our device as a large display component.