Title :
Compact And Stress-Released Piston Tip-Tilt Mirror
Author :
Overstolz, T. ; Noell, W. ; Stanley, R. ; de Rooij, N.F.
Author_Institution :
SAMLAB, Institute of Microtechnology (IMT), University of Neuchâtel, SWITZERLAND
Abstract :
Devices based on SOI technology are subject to bow due to residual stress induced by the buried oxide. We have designed and fabricated a compact tunable piston tip-tilt mirror device in which the shape and the arrangement of the suspension beams result in both a reduced stress in the suspension beams and an optically flat mirror. The piston tip-tilt mirror is characterized by an accurate vertical displacement of up to 18 µ m @80 V with good repeatability, and a tip-tilt of up to 2 mrad @50 V.
Keywords :
Adaptive optics; Electrodes; Electrostatics; Fabry-Perot; Mirrors; Optical beams; Optical devices; Pistons; Residual stresses; Shape;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627910
