DocumentCode
1879237
Title
Compact And Stress-Released Piston Tip-Tilt Mirror
Author
Overstolz, T. ; Noell, W. ; Stanley, R. ; de Rooij, N.F.
Author_Institution
SAMLAB, Institute of Microtechnology (IMT), University of Neuchâtel, SWITZERLAND
fYear
2006
fDate
2006
Firstpage
758
Lastpage
761
Abstract
Devices based on SOI technology are subject to bow due to residual stress induced by the buried oxide. We have designed and fabricated a compact tunable piston tip-tilt mirror device in which the shape and the arrangement of the suspension beams result in both a reduced stress in the suspension beams and an optically flat mirror. The piston tip-tilt mirror is characterized by an accurate vertical displacement of up to 18 µ m @80 V with good repeatability, and a tip-tilt of up to 2 mrad @50 V.
Keywords
Adaptive optics; Electrodes; Electrostatics; Fabry-Perot; Mirrors; Optical beams; Optical devices; Pistons; Residual stresses; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627910
Filename
1627910
Link To Document