Peristaltic PDMS Pump with Perfect Dynamic Valves for Both Gas and Liquid

Author

Jeong, Ok Chan ; Morimoto, Takashi ; Watanabe, Yuusaku ; Konishi, Satoshi

Author_Institution

Center of Promotion of the COE program, Ritsumeikan University, JAPAN

fYear

2006

fDate

2006

Firstpage

782

Lastpage

785

Abstract

This paper presents for the first time experimental results on the peristaltic PDMS pump with perfect dynamic valves for both gas and liquid. Micropump consists of the three peristaltic-type actuators and the micro channel connecting with chambers and the inlet/outlet port. Micropump is fabricated by SU8 mold process and the two-step curing process for the irreversible bonding of PDMS layers. The diameter and the thickness of the actuator diaphragm are 1 mm and 98 μm, respectively. The total size of micro pump is about 5 mm x 5.5 mm. The dynamic gas and liquid valve actions of the single actuator are observed to verify effect of the fluidic mass and viscosity of the working fluid. Perfect peristaltic motions and robust pumping actions of the micro pump are confirmed by the flowrate test of micropump with the air and the ink.

Keywords

Actuators; Bonding; Curing; Fluid dynamics; Joining processes; Micropumps; Pumps; Robustness; Valves; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

Conference_Location

Istanbul, Turkey

ISSN

1084-6999

Print_ISBN

0-7803-9475-5

Type

conf

DOI

10.1109/MEMSYS.2006.1627916

Filename

1627916