Title :
A Novel Type of Mechanical Power Transmission Array for Switching Densely-Arrayed Actuator Systems
Author :
Sasaki, Hiromu ; Shikida, M. ; Sato, Kiminori
Author_Institution :
Dept. of Micro System Eng., Nagoya University, Japan
Abstract :
This paper proposes a novel type mechanical transmission system for driving arrayed elements. The main advantage of this system is that it is able to operate individually arrayed elements with high-power. It was fabricated by MEMS technologies, and was confirmed that we are able to individually drive the arrayed elements by selectively driving tulip-shaped electrostatic clutch devices that transmit large power coming from a single power source. The transmitted stroke was 20 µ m for this experiment.
Keywords :
Actuators; Electrostatics; End effectors; Etching; Mechanical power transmission; Microactuators; Micromechanical devices; Optical transmitters; Rubber; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627918
