Noise Consideration for Micromachined Digital Accelerometers

Author

Kollár, Martin ; Michaeli, Linus

Author_Institution

Dept. of Electr. Eng. & Meas., Tech. Univ. of Kosice

fYear

2006

fDate

24-27 April 2006

Firstpage

507

Lastpage

512

Abstract

Three noise sources are present in a sigma-delta modulator (SigmaDeltaM) type system applied to a micromachined accelerometer: mechanical noise due to Brownian motion, electronic noise introduced by the interface circuit due to thermal noise sources in the electronic devices and quantisation noise due to the analog to digital conversion process. Based on theory of limit cycles in nonlinear closed loop systems, the mathematical model and formulae for power spectral density calculation of a micromachined accelerometer are derived in this paper. The theoretical considerations agree well with the simulation results in Matlab SIMULINK

Keywords

accelerometers; micromachining; microsensors; sigma-delta modulation; thermal noise; Brownian motion; Matlab SIMULINK; analog to digital conversion; electronic devices; electronic noise; interface circuit; limit cycles theory; mathematical model; micromachined digital accelerometers; nonlinear closed loop systems; power spectral density calculation; quantisation noise; sigma-delta modulator; thermal noise; Accelerometers; Channel bank filters; Circuit noise; Delta-sigma modulation; Electrodes; Force feedback; Mathematical model; Noise shaping; Quantization; Voltage; Brownian noise; quantisation noise;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2006. IMTC 2006. Proceedings of the IEEE

Conference_Location

Sorrento

ISSN

1091-5281

Print_ISBN

0-7803-9359-7

Electronic_ISBN

1091-5281

Type

conf

DOI

10.1109/IMTC.2006.328552

Filename

4124378