Membrane probe technology for non-destructive thin-film material characterization

Author

Pham, A. ; Mathis, A. ; Laskar, J. ; Peterson, A.F. ; Hayden, L.

Author_Institution

Packaging Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA

Volume

2

fYear

1998

fDate

7-12 June 1998

Firstpage

957

Abstract

We present the design and development of the membrane probe prototype for nondestructive characterization of thin-film materials. This material membrane probe (MMP) is designed with multiple polyimide coplanar wave guide transmission lines (CPW), which enable effective and accurate on-wafer Thru-Reflect-Line calibration. This MMP significantly improves upon the calibration integrity and measurements over previous results. We have measured dielectric properties of various materials at microwave frequencies and conclusively demonstrate that the MMP can be used to nondestructively characterize thin-film materials.

Keywords

calibration; coplanar waveguides; dielectric measurement; dielectric thin films; membranes; microwave measurement; dielectric properties; material membrane probe; microwave measurement; multiple polyimide CPW transmission line; nondestructive characterization; on-wafer Thru-Reflect-Line calibration; thin film; Biomembranes; Calibration; Dielectric materials; Dielectric measurements; Dielectric thin films; Polyimides; Probes; Prototypes; Transistors; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1998 IEEE MTT-S International

Conference_Location

Baltimore, MD, USA

ISSN

0149-645X

Print_ISBN

0-7803-4471-5

Type

conf

DOI

10.1109/MWSYM.1998.705150

Filename

705150