Title :
Membrane probe technology for non-destructive thin-film material characterization
Author :
Pham, A. ; Mathis, A. ; Laskar, J. ; Peterson, A.F. ; Hayden, L.
Author_Institution :
Packaging Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We present the design and development of the membrane probe prototype for nondestructive characterization of thin-film materials. This material membrane probe (MMP) is designed with multiple polyimide coplanar wave guide transmission lines (CPW), which enable effective and accurate on-wafer Thru-Reflect-Line calibration. This MMP significantly improves upon the calibration integrity and measurements over previous results. We have measured dielectric properties of various materials at microwave frequencies and conclusively demonstrate that the MMP can be used to nondestructively characterize thin-film materials.
Keywords :
calibration; coplanar waveguides; dielectric measurement; dielectric thin films; membranes; microwave measurement; dielectric properties; material membrane probe; microwave measurement; multiple polyimide CPW transmission line; nondestructive characterization; on-wafer Thru-Reflect-Line calibration; thin film; Biomembranes; Calibration; Dielectric materials; Dielectric measurements; Dielectric thin films; Polyimides; Probes; Prototypes; Transistors; Transmission line measurements;
Conference_Titel :
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4471-5
DOI :
10.1109/MWSYM.1998.705150
