Title :
E-Beam Photoresist and Carbon Nanotubes as Biomimetic Dry Adhesives
Author :
Tsai, Y.-C. ; Shih, W.-P. ; Wang, Y.-M. ; Huang, L.-S. ; Shih, P.-J.
Author_Institution :
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
Abstract :
This paper presents the fabrication and characterization of nano-fibrils mimicking gecko foot-hairs for enhanced dry adhesion. High contact area ratio of the polymer and carbon nanotube fibrils is achieved, respectively, using e-beam lithography and chemical vapor deposition. The adhesion forces from gecko foot-hairs and the artificial fibrils are measured with a customized AFM tip to evaluate the effects of different materials and surface density. With the water-vapor assisted deposition, the surface density of the carbon nanotubes is optimized for comparable adhesion forces to gecko foot-hairs.
Keywords :
Adhesives; Biomimetics; Carbon nanotubes; Chemical vapor deposition; Density measurement; Fabrication; Force measurement; Lithography; Polymers; Resists;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627952
