TSM Acoustic Wave Sensors for Liquid Media based on Miller Oscillators

So far, the success of the design of circuit oscillators for use as mass sensors in damping media depends strongly on the ability and the designer´s experience. The conditions of strong damping that the quartz experiences imply the necessity to adapt the designs so that the oscillation stays in spite of the reduction of its quality factor. Despite all the efforts developed by various authors, a methodology of design of electronic circuit oscillators for their use in damping media does not exist up to now. It is due to the difficulty of the study of the oscillation condition and its possible optimization in function of the application. In this paper we propose a methodology to aid the designers to develop TSM acoustic wave sensors for high resolution microgravimetrical applications in liquid media, such as detection of chemical species, biosensors for molecular recognition, etc. Approaches are presented to carry out sensor oscillators based on the Miller topology. These approaches allow the oscillator to be designed in function of the operational conditions