DocumentCode
1880776
Title
Near-field scanning microwave microscopy: measuring local microwave properties and electric field distributions
Author
Feenstra, B.J. ; Vlahacos, C.P. ; Thanawalla, A.S. ; Steinhauer, D.E. ; Dutta, S.K. ; Wellstood, F.C. ; Anlage, S.M.
Author_Institution
Dept. of Phys., Maryland Univ., College Park, MD, USA
Volume
2
fYear
1998
fDate
7-12 June 1998
Firstpage
965
Abstract
We describe the near-field scanning microwave microscopy of microwave devices on a length scale much smaller than the wavelength used for imaging. Our microscope can be operated in two possible configurations, allowing a quantitative study of either material properties or local electric fields.
Keywords
electric field measurement; microwave measurement; scanning probe microscopy; local electric field distribution; local microwave properties; measurement technique; microwave device; near-field scanning microwave microscopy; Atomic force microscopy; Coaxial components; Electric variables measurement; Material properties; Microwave devices; Microwave measurements; Power transmission lines; Probes; Resonance; Superconducting microwave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location
Baltimore, MD, USA
ISSN
0149-645X
Print_ISBN
0-7803-4471-5
Type
conf
DOI
10.1109/MWSYM.1998.705152
Filename
705152
Link To Document