Title :
New 1.7kV IGBT chip with fine pattern and optimized buffer layer
Author :
Donlon, John F. ; Motto, Eric R. ; Satoh, K. ; Suzuki, K. ; Yoshihiura, Y. ; Takahashi, T.
Author_Institution :
Powerex, Inc., Youngwood, PA, USA
Abstract :
Since the introduction of the IGBT, improvements in power loss and efficiency have been achieved by applying new technologies. In this paper, refinements in fine pattern processing technology and optimization of the low impurity profile of the buffer layer using thin wafer technology are proposed to further reduce the power loss and improve efficiency in 1.7kV IGBT chips.
Keywords :
buffer layers; insulated gate bipolar transistors; low-power electronics; IGBT chip; fine pattern processing technology; low impurity profile optimization; optimized buffer layer; power efficiency; power loss; thin wafer technology; voltage 1.7 kV; Buffer layers; Capacitance; Circuits; Doping profiles; Energy conservation; Impurities; Insulated gate bipolar transistors; Inverters; Motor drives; Ultra large scale integration;
Conference_Titel :
Applied Power Electronics Conference and Exposition (APEC), 2010 Twenty-Fifth Annual IEEE
Conference_Location :
Palm Springs, CA
Print_ISBN :
978-1-4244-4782-4
Electronic_ISBN :
1048-2334
DOI :
10.1109/APEC.2010.5433642