Title :
A moveable shielding box adaptable to commercial automatic wafer probers
Author :
Lozano, M. ; Cané, C. ; Santander, J. ; Grà, I. ; Lora-Tamayo, E.
Author_Institution :
Centre Nacional de Microelectron., Univ. Auton. de Barcelona, Spain
Abstract :
A compact movable shielding box designed to be easily adapted to commercial automatic wafer probers is presented. This design allows the realization of automatic wafer mapping in a shielded area. It only covers the chuck and the prober area, avoiding the use of cumbersome Faraday boxes. Its design is explained, and the effective shielding capabilities are demonstrated by measuring subthreshold currents
Keywords :
automatic test equipment; probes; semiconductor device testing; shielding; automatic wafer mapping; automatic wafer probers; effective shielding capabilities; moveable shielding box; shielded area; subthreshold currents; Circuits; Current measurement; Energy consumption; Impedance measurement; Instruments; Interference; Manufacturing; Probes; Seals; Subthreshold current;
Conference_Titel :
Microelectronic Test Structures, 1993. ICMTS 1993. Proceedings of the 1993 International Conference on
Conference_Location :
Sitges
Print_ISBN :
0-7803-0857-3
DOI :
10.1109/ICMTS.1993.292917
