DocumentCode
1882166
Title
A moveable shielding box adaptable to commercial automatic wafer probers
Author
Lozano, M. ; Cané, C. ; Santander, J. ; Grà, I. ; Lora-Tamayo, E.
Author_Institution
Centre Nacional de Microelectron., Univ. Auton. de Barcelona, Spain
fYear
1993
fDate
22-25 Mar 1993
Firstpage
219
Lastpage
222
Abstract
A compact movable shielding box designed to be easily adapted to commercial automatic wafer probers is presented. This design allows the realization of automatic wafer mapping in a shielded area. It only covers the chuck and the prober area, avoiding the use of cumbersome Faraday boxes. Its design is explained, and the effective shielding capabilities are demonstrated by measuring subthreshold currents
Keywords
automatic test equipment; probes; semiconductor device testing; shielding; automatic wafer mapping; automatic wafer probers; effective shielding capabilities; moveable shielding box; shielded area; subthreshold currents; Circuits; Current measurement; Energy consumption; Impedance measurement; Instruments; Interference; Manufacturing; Probes; Seals; Subthreshold current;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1993. ICMTS 1993. Proceedings of the 1993 International Conference on
Conference_Location
Sitges
Print_ISBN
0-7803-0857-3
Type
conf
DOI
10.1109/ICMTS.1993.292917
Filename
292917
Link To Document