Title :
A flexible test structure evaluation system for reliability data analysis
Author :
Mori, Masamichi ; Kuriyama, Youichi ; Shiono, Noboru
Author_Institution :
NTT LSI Lab., Kanagawa, Japan
Abstract :
A test structure evaluation system with powerful data processing capability is developed for effective measurement data acquisition and reliability data analysis. Data analysis can be performed quickly with a unified data format customized to reliability data. A unified, flexible system is achieved by networking discrete measuring systems and by generalizing common routines in measurement programs
Keywords :
VLSI; circuit reliability; integrated circuit testing; data processing capability; discrete measuring systems; evaluation system; flexible test structure; reliability data analysis; unified data format; Circuit testing; Conductors; Data analysis; Data processing; Large scale integration; MOS capacitors; MOSFETs; Power system reliability; Process design; System testing;
Conference_Titel :
Microelectronic Test Structures, 1993. ICMTS 1993. Proceedings of the 1993 International Conference on
Conference_Location :
Sitges
Print_ISBN :
0-7803-0857-3
DOI :
10.1109/ICMTS.1993.292921
