Title :
Heterogeneously integrated SOI compound semiconductor photonics
Author :
Van Thourhout, Dries ; Roelkens, Gunther
Author_Institution :
Photonics Res. Group, Ghent Univ., Ghent, Belgium
Abstract :
We present a review of recent progress in III-V on silicon heterogeneous integration technology. Both fabrication technology and devices are discussed.
Keywords :
III-V semiconductors; integrated optics; optical fabrication; optical waveguides; reviews; silicon-on-insulator; III-V on silicon heterogeneous integration technology; Si; fabrication technology; heterogeneously integrated SOI compound semiconductor photonics; review; silicon waveguides; Photonics;
Conference_Titel :
Optical Communication, 2009. ECOC '09. 35th European Conference on
Conference_Location :
Vienna
Print_ISBN :
978-1-4244-5096-1
