Title :
Large scale multilayer glass-ceramic substrate for supercomputer
Author :
Shimada, Yusuke ; Kobayashi, Yoshinobu ; Kata, Keiichiro ; Kurano, Masayuki ; Takamizawa, Hideo
Author_Institution :
NEC Corp., Kanagawa, Japan
Abstract :
A large-scale multilayer glass-ceramic (MGC) substrate, which has a low dielectric constant (7.8) and a high flexural strength, has been developed by means of highly accurate green-sheet technology. The multilayer substrate has the following characteristics: (1) the substrate size is 225 mm×225 mm, 5.5-mm thick; (2) low electrical resistivity (3 μΩ-cm) can be realized by using a gold paste system in forming the conductors, for achieving a low voltage drop; (3) the substrate can support high-density pattern processing due to the highly accurate process; (4) shrinkage can be controlled to 13.0%±0.3%, in spite of large dimensions, by shrinkage-control technology; and (5) the substrate has a high flexural strength of 3000 kg/cm2. This substrate is applied to a multilayer substrate (MLS) for supercomputer multichip packages
Keywords :
VLSI; ceramics; integrated circuit technology; laminates; packaging; powder technology; substrates; 3 muohmcm; gold paste system; green-sheet technology; high flexural strength; high system performance; high-density pattern processing; low dielectric constant; multilayer glass-ceramic substrate; shrinkage-control; supercomputer multichip packages; Conductors; Dielectric constant; Dielectric substrates; Electric resistance; Gold; Large-scale systems; Low voltage; Nonhomogeneous media; Size control; Supercomputers;
Conference_Titel :
Electronic Components and Technology Conference, 1990. ., 40th
Conference_Location :
Las Vegas, NV
DOI :
10.1109/ECTC.1990.122171
