DocumentCode
1883241
Title
3D model of micromachined heat flux sensor
Author
Gridchin, Victor A. ; Lobach, Oleg V. ; Dikareva, Regina P.
Author_Institution
Novosibirsk State Technical University, Russia
fYear
2010
fDate
22-24 Sept. 2010
Firstpage
232
Lastpage
234
Abstract
In this paper the silicon micromachined heat flux sensor is shown. The full model of a heat flux sensor with the built in heater is presented. Temperature distribution in complex 3D model of heat flux sensor is received. Sensor models with different forms of a heater are described. The comparative analysis of the received results is carried out.
Keywords
Biomembranes; Heating; Sensitivity; Silicon; Temperature distribution; Temperature sensors; MEMS; heat flux sensor; microsystems; numerical modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electronic Instrument Engineering (APEIE), 2010 10th International Scientific-Technical Conference on
Conference_Location
Novosibirsk, Russia
Print_ISBN
978-1-4244-8209-2
Electronic_ISBN
978-1-4244-8210-8
Type
conf
DOI
10.1109/APEIE.2010.5677325
Filename
5677325
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