Title :
MEMS for IT applications
Author :
Lee, Sukhan ; Kim, Chungwoo ; Jung, Sunghwan ; Song, In-Sup ; Cho, Yong Chul
Author_Institution :
Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
The recent progress of MEMS in Samsung Advanced Institute of Technology (SAIT) is presented, focusing on MEMS applications to information technology (IT). The items introduced include: (1) a MEMS gyroscope for consumer electronics; (2) an electrostatic secondary stage MEMS actuator for high density HDD; (3) a micro cooling system for cooling of high performance chips; and (4) a RF MEMS switch for mobile phones. Emphases are given to the factors affecting the commercial success of MEMS as well as the impact of MEMS on future IT
Keywords :
cooling; information technology; microactuators; micromechanical devices; switches; MEMS; RF microswitch; Samsung Advanced Institute of Technology; gyroscope; micro cooling system; microactuator; micromechanical devices; Consumer electronics; Cooling; Electrostatic actuators; Gyroscopes; Mechanical sensors; Micromechanical devices; Mobile communication; Research and development; Silicon; Switches;
Conference_Titel :
Micromechatronics and Human Science, 2001. MHS 2001. Proceedings of 2001 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-7190-9
DOI :
10.1109/MHS.2001.965216
