Sensitivity analysis for a piezoresistive rotary movement micro gyroscope

Sensitivity of a piezoresistive rotary movement micro gyroscope was investigated. The gyroscope consists of a folded cross silicon beam with piezoresistors, and pillars at the center of the cross beam. Four electromagnets induce the rotary movement of the pillars. The micro gyroscope has the advantage of sensing angular rate around the X- and Y-axes. The micro gyroscope can cancel acceleration using the pillars that were fixed on both sides of the beam, and the locations of the piezoresistors. Sensitivity of the micro gyroscope was estimated, taking account of the fracture strength of the folded cross silicon beam. The sensitivity of the micro gyroscope that was obtained by the analysis was 4.0 nV /deg/s