DocumentCode
1884534
Title
RF MEMS switch for wireless LAN applications
Author
Lee, Kee-Keun ; Kim, Bruce C.
Author_Institution
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
fYear
2003
fDate
20-23 July 2003
Firstpage
100
Lastpage
102
Abstract
Double cantilever beam MEMS switch was developed for wireless LAN applications. The two beams are controlled by a single actuation electrode. The dimension of the fabricated cantilever beam is 150 μm × 60 μm × 0.6 μm. The spacing between the top beam and the bottom ground electrode was approximately 1 μm. This switch has low pull-in voltage of 15 V and fast switching speed of 60 μs. An RF performance with >-50 dB isolation below 5 GHz and <-0.18 dB up to 30 GHz was observed.
Keywords
low-power electronics; microswitches; microwave switches; wireless LAN; 15 V; 30 GHz; RF MEMS switch; double cantilever beam MEMS switch; fast switching; isolation; single actuation electrode; top beam-bottom ground electrode spacing; wireless LAN applications; Contacts; Electrodes; Gold; Low voltage; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Structural beams; Switches; Wireless LAN;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
Print_ISBN
0-7695-1947-4
Type
conf
DOI
10.1109/ICMENS.2003.1221973
Filename
1221973
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