• DocumentCode
    1884627
  • Title

    Transition of MEMS technology to nanofabrication

  • Author

    Jakeway, Stephen C. ; Crabtree, H. John ; Veres, Teodor ; Cameron, Neil S. ; Luesebrink, Helge ; Glinsner, Thomas

  • Author_Institution
    Micralyne Inc., Edmonton, Alta., Canada
  • fYear
    2003
  • fDate
    20-23 July 2003
  • Firstpage
    118
  • Lastpage
    122
  • Abstract
    The transition of MEMS technology to nano fabrication is a solution to the growing demand for smaller and high-density feature sizes in the nanometer scale. Techniques for fabricating μm-, and nm-features will be discussed, and results achieved with nanoimprinting technologies will be presented.
  • Keywords
    embossing; microfluidics; micromechanical devices; nanolithography; printing; transfer moulding; ultraviolet lithography; MEMS technology transition; high-density feature size; nanofabrication; nanoimprinting technologies; Embossing; Helium; Micromechanical devices; Nanofabrication; Polymers; Pressure control; Research and development; Temperature control; Temperature sensors; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
  • Print_ISBN
    0-7695-1947-4
  • Type

    conf

  • DOI
    10.1109/ICMENS.2003.1221977
  • Filename
    1221977
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1884627