• DocumentCode
    1884894
  • Title

    The Interaction Between Metrological Parameters and Industrial Process Simulation Requirements for Equipment Scale-Up/Down by means of Dimensional Analysis

  • Author

    Batzias, Fragiskos A.

  • Author_Institution
    Dept. of Ind. Manage. & Technol., Piraeus Univ.
  • fYear
    2006
  • fDate
    24-27 April 2006
  • Firstpage
    1490
  • Lastpage
    1495
  • Abstract
    Industrial process scale up from laboratory to large scale by means of similarity theory and relevant techniques implies usually deviation of metrological parameter values, as a result of conditions changing. The present work deals with the design/development of an algorithmic procedure based on the interaction between metrological parameters and industrial process simulation for improving scale up by means of dimensional analysis when: (i) co-exists an engineering model; and (ii) no model has been reported so far in technical literature or practice. Implementation for both cases has been included
  • Keywords
    algebra; manufacturing processes; semiconductor process modelling; dimensional analysis; engineering model; industrial process simulation; interval algebra; metrological parameters; Algorithm design and analysis; Analytical models; Computational modeling; Computer aided engineering; Computer simulation; Design automation; Laboratories; Large-scale systems; Merging; Metrology; dimensional analysis; interval algebra; metrology; scale-up/down; similarity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference, 2006. IMTC 2006. Proceedings of the IEEE
  • Conference_Location
    Sorrento
  • ISSN
    1091-5281
  • Print_ISBN
    0-7803-9359-7
  • Electronic_ISBN
    1091-5281
  • Type

    conf

  • DOI
    10.1109/IMTC.2006.328645
  • Filename
    4124593