• DocumentCode
    1884918
  • Title

    Three-dimensional square spiral photonic crystal nanostructures by glancing angle deposition

  • Author

    Kennedy, S.R. ; Jensen, M.O. ; Brett, M.J.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, Alta., Canada
  • fYear
    2003
  • fDate
    20-23 July 2003
  • Firstpage
    165
  • Lastpage
    171
  • Abstract
    We demonstrate the fabrication of a three-dimensional photonic band gap nanostructure using the unique Glancing Angle Deposition (GLAD) thin film technique. This innovative photonic structure is based on a tetragonal, square spiral symmetry found in FCC and diamond lattices and can be implemented in a virtual single-step fabrication process using GLAD. A highly porous film with engineered nanostructure results from the implementation of advanced substrate motion during the deposition, and three-dimensional periodicity required for a photonic crystal can be obtained when a square spiral staircase is fabricated on a tetragonally seeded substrate. We present successful fabrication of three-dimensional square spiral structures along with some examples of the unique capabilities of these nanostructured thin films.
  • Keywords
    elemental semiconductors; nanoporous materials; nanotechnology; photonic band gap; photonic crystals; semiconductor growth; semiconductor thin films; silicon; vapour deposition; glancing angle deposition; photonic crystal; photonic structure; porous thin films; square spiral symmetry; tetragonally seeded substrate; three-dimensional photonic band gap nanostructure; FCC; Fabrication; Lattices; Nanostructures; Photonic band gap; Photonic crystals; Spirals; Sputtering; Substrates; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
  • Print_ISBN
    0-7695-1947-4
  • Type

    conf

  • DOI
    10.1109/ICMENS.2003.1221987
  • Filename
    1221987