Title :
ES4: Fusion of MEMS and circuits
Author :
Shigematsu, Satoshi ; Arimoto, Kazutami ; Hagleitner, Christoph
Author_Institution :
NTT Electronics, Yokohama, Japan
Abstract :
In recent times, the market for sensor applications that use MEMS (accelerator, gas, pressure, etc.) has greatly expanded. In the future, MEMS devices are expected to provide innovations for new chip functions and to enable the “More than Moore” era.
Keywords :
Circuit testing; Consumer electronics; Gas detectors; Gyroscopes; Mechanical sensors; Microelectromechanical devices; Micromechanical devices; Mirrors; Random access memory; Sensor fusion;
Conference_Titel :
Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
978-1-4244-6033-5
DOI :
10.1109/ISSCC.2010.5433878
