Thin film tunnels versus air-bridges in coplanar waveguide discontinuities

Author

Soliman, E.A. ; Pieters, P. ; Beyne, E.

Author_Institution

IMEC, Leuven, Belgium

Volume

2

fYear

1998

fDate

7-12 June 1998

Firstpage

1039

Abstract

In this paper, a new method for the suppression of the slot line (odd) mode in the CPW based microwave circuits is presented. The proposed method replaces the costly and mechanically unstable air-bridges. It uses an under pass (tunnel) on an intermediate metalization layer below the CPW line and above the substrate. This method is convenient for MCM-D technology in which thin films are deposited over the substrate to support the required interconnects. The method has been applied to a band reject filter and compared with the case of air bridges.

Keywords

band-stop filters; coplanar waveguides; integrated circuit interconnections; microwave integrated circuits; multichip modules; thin film circuits; CPW based microwave circuits; CPW discontinuities; CPW line; MCM-D technology; air-bridges; band reject filter; coplanar waveguide discontinuities; interconnects; metalization layer under pass; slot line mode suppression; thin film tunnels; thin films; Band pass filters; Bridge circuits; Coplanar waveguides; Integrated circuit interconnections; Microwave circuits; Microwave theory and techniques; Sputtering; Substrates; Thin film circuits; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1998 IEEE MTT-S International

Conference_Location

Baltimore, MD, USA

ISSN

0149-645X

Print_ISBN

0-7803-4471-5

Type

conf

DOI

10.1109/MWSYM.1998.705171

Filename

705171