DocumentCode :
1886601
Title :
A better choice-a fuzzy logic based lot sequencing decision support system for operators in a job shop fab with reentrant process flows
Author :
Roobeek, Frans
Author_Institution :
Philips Semicond., Nijmegen, Netherlands
fYear :
1997
fDate :
6-8 Oct 1997
Abstract :
Significant reduction of cycle times can be achieved by removing barriers. Cross training, cross functional teams, leveled production, starts control, bottle-neck management and so on are the well known ways that help to improve the process. No matter how well this matter is dealt with, disturbances will occur in any waferfab. The only way operators can still influence the fabs cycle time performance is by making the right choices when selecting which equipment to operate first and which lot(s) to process next. This is a difficult task, since many factors should be taken into account, particularly in mixed volume, mixed process, mixed product fabs with reentrant process flows. As part of the research program ABC, A Better Choice, a fuzzy logic based lot sequencing decision support system has been developed and implemented. Heuristics as well as theory were used in its design. The DSS has brought significant benefits in a fully loaded fab in terms of more outs, while retaining a good cycle time
Keywords :
decision support systems; fuzzy logic; integrated circuit manufacture; production control; cycle times; decision support system; fully loaded fab; fuzzy logic; job shop fab; lot sequencing; mixed product fabs; reentrant process flows; waferfab; BiCMOS integrated circuits; Cellular neural networks; Decision support systems; Fuzzy logic; Fuzzy neural networks; Neck; Quantum cascade lasers; Throughput; User interfaces; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3752-2
Type :
conf
DOI :
10.1109/ISSM.1997.664489
Filename :
664489
Link To Document :
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