DocumentCode :
1886834
Title :
Superplastic micro-forming of microstructures
Author :
Saotome, Yasunori ; Inoue, Akihisa
Author_Institution :
Dept. of Mech. Eng., Gunma Univ., Japan
fYear :
1994
fDate :
1994
Firstpage :
343
Lastpage :
348
Abstract :
Superplastic micro-forming processes have been applied to forming and fabrication of micromechanical components. Selected materials are a fine grained superplastic Al-78Zn alloy, pure iron as a transformation superplastic material, and amorphous LaAlNi, ZrAlCu alloys which exhibit a supercooled liquid state. With these materials, microformability tests have been carried out with the specially developed evaluation system by using V-grooved micro dies made of (100) silicon. The throat width of the V-groove is from 1 to 20 μm. With these dies, micro-forging has been carried out and the characteristics of micro-formability of the material have been clarified. In a fine grained superplastic of polycrystalline aggregates, the accuracy limit of micro-formability is depend on the grain diameter. On the other hand, quite superior formability has been observed in the amorphous alloys after forming under a supercooled liquid condition. These results indicate an importance of a deformation mechanism from a view point of polycrystalline structure or a micro(μm) scopic scale. A good micro-formability shown above has been applied to a dosed die forging of microstructures such as micro pyramids and microdouble gear system. As a result, superplastic materials and amorphous alloys are useful for micro-forming and fabrication of microstructures or components for MEMS
Keywords :
micromachining; 1 to 20 mum; Al-78Zn alloy,; Al-Zn; LaAlNi; MEMS; Si; V-grooved micro dies; ZrAlCu; ZrAlCu alloys; [100] silicon; amorphous LaAlNi; amorphous alloys; deformation mechanism; dosed die forging; fine grained superplastic; micro pyramids; micro-formability; microdouble gear; microformability tests; micromechanical components; microstructures; polycrystalline structure; supercooled liquid state; superplastic materials; superplastic micro-forming; throat width; Aggregates; Amorphous materials; Fabrication; Gears; Iron alloys; Materials testing; Micromechanical devices; Microstructure; Silicon; System testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
Type :
conf
DOI :
10.1109/MEMSYS.1994.556164
Filename :
556164
Link To Document :
بازگشت