DocumentCode
1887858
Title
Detailed investigations of field emission from vacuum arc-prepared carbon emitters with no sharp protrusions
Author
Horie, S. ; Asanagi, K. ; Myojin, T. ; Yamada, Y. ; Sasaki, M.
Author_Institution
Inst. of Appl. Phys., Univ. of Tsukuba, Tsukuba, Japan
fYear
2015
fDate
13-17 July 2015
Firstpage
78
Lastpage
79
Abstract
Field emission features and FIM/FEM images from vacuum arc-prepared carbon films on shape-controlled W tip apexes have been examined, where tens of samples with different film thicknesses and different radii were prepared. The obtained results imply that superior field emission is not due to the protrusions with high aspect ratio but its intrinsic nano-structures.
Keywords
field emission; thin films; vacuum arcs; vacuum microelectronics; FIM/FEM images; carbon emitters; field emission; intrinsic nanostructures; shape-controlled W tip apexes; sharp protrusions; vacuum arc-prepared carbon films; Carbon; Carbon dioxide; Coatings; Films; Finite element analysis; Vacuum arcs; Vacuum technology; FEM; FIM; carbon film; field emission; low macroscopic-field emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference (IVNC), 2015 28th International
Conference_Location
Guangzhou
Print_ISBN
978-1-4673-9356-0
Type
conf
DOI
10.1109/IVNC.2015.7225539
Filename
7225539
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