Field emission of sheet electron beam from single layer graphene

Author

Jinbiao Yang ; Linchuan Song ; Shan Yang ; Jianlong Liu ; Baoqing Zeng

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Vacuum Electron., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2015

fDate

13-17 July 2015

Firstpage

134

Lastpage

135

Abstract

Field emitter of sheet electron beam is made by transferring chemical vapor deposition (CVD)-graphene films onto SiO₂/Si substrate. Field emission of sheet electron beam is from the edge of graphene/SiO₂/Si. These sheet electron beams would be useful to vacuum electron devices and electron beam lithograph. Besides good emission current, graphene films electron beam is also tolerable with excellent emission stability. With good emission properties, graphene films electron beam bring application insight.

Keywords

chemical vapour deposition; electron field emission; graphene; thin films; C; CVD; SiO₂-Si; SiO₂-Si substrate; chemical vapor deposition-graphene films; electron beam lithography; emission current; emission stability; sheet electron beam field emission; sheet electron beam field emitter; single layer graphene; vacuum electron devices; Copper; Electron beams; Graphene; Optical films; Silicon; Substrates; electron beam; field emission; graphene;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2015 28th International

Conference_Location

Guangzhou

Print_ISBN

978-1-4673-9356-0

Type

conf

DOI

10.1109/IVNC.2015.7225558

Filename

7225558