Title :
In-place synthesis of metallic nanowire arrays for the use in an ionization vacuum gauge
Author :
Roustaie, F. ; Quednau, S. ; Dassinger, F. ; Schlaak, H.F. ; Lotz, M. ; Wilfert, S.
Author_Institution :
Inst. of Electromech. Design (EMK), Tech. Univ. Darmstadt, Darmstadt, Germany
Abstract :
An in-place synthesis process for nanowires is used to fabricate a customized field emitter array for the use as a non-thermal electron source in an ionization gauge. The fabrication was further expanded to metallic nanocones with a density of 1.6 × 106 cm-2 using optimized deposition of the cones on predefined electrodes. This method can make the wide area of the predefined electrodes enclosed with nanowires with less standard deviation in their height.
Keywords :
electrochemical electrodes; electron sources; field emitter arrays; ionisation; nanofabrication; nanosensors; nanowires; sensor arrays; cone deposition; customized field emitter array; electrode; in-place synthesis process; ionization vacuum gauge; metallic nanocone; metallic nanowire array; nanofabrication; nonthermal electron source; Cathodes; Fabrication; Gold; Polymers; Substrates; Wires; field emission; field emitter array; ion gauge; metallic nanocones; metallic nanowires; vacuum gauge;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2015 28th International
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-9356-0
DOI :
10.1109/IVNC.2015.7225571