Design optimization of a limited angle voice coil actuator for use in a wire bonding application

The design optimization of a limited angle voice coil actuator is described in this paper. The actuator´s function is to position an ultrasonic transducer that will produce gold interconnections, with wire, between semiconductor devices and substrates. The tip of the transducer carries a capillary that must accelerate in excess of 50G, yet still control the touchdown velocity to within 5 mm/s. The actuator is designed to maximize the force/mass while the moving coil must balance the inertia of the rotary system around the pivot spring bearing. A simulated annealing based constrained optimization technique is employed in the design, along with magnetic lumped parameter and finite element analyses which are used for the motor simulation