DocumentCode
1889034
Title
Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications
Author
Chen, Fan ; Spencer, Matt ; Nathanael, Rhesa ; Chengcheng Wang ; Fariborzi, Hossein ; Gupta, Arpan ; Hei Kam ; Pott, Vincent ; Jaeseok Jeon ; Tsu-Jae King Liu ; Markovic, Dejan ; Stojanovic, V. ; Alon, Elad
Author_Institution
Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear
2010
fDate
7-11 Feb. 2010
Firstpage
150
Lastpage
151
Abstract
A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.
Keywords
VLSI; circuit testing; microswitches; I/O function; VLSI application; carry-generation block; integrated microelectromechanical switch circuits; logic function; memory function; monolithic integration; test chip; timing function; Circuit testing; Inverters; Logic circuits; Logic testing; Monolithic integrated circuits; Oscillators; Switches; Switching circuits; Timing; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International
Conference_Location
San Francisco, CA
ISSN
0193-6530
Print_ISBN
978-1-4244-6033-5
Type
conf
DOI
10.1109/ISSCC.2010.5434010
Filename
5434010
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